Plasma Chemistry and Plasma Chemical Engineering
نویسندگان
چکیده
منابع مشابه
Plasma processing and chemistry*
Plasma deposition and plasma conversion can be characterized by five steps: production by ionization, transfer of chemistry to precursors, transport of radicals to the surface, surface interactions with deposition, recirculation and generation of new monomers. For very fast deposition, large flows of radicals are needed and a regime is reached, in which monolayer coverage is reached in a very s...
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ژورنال
عنوان ژورنال: Journal of the Japan Society of Colour Material
سال: 1974
ISSN: 0010-180X
DOI: 10.4011/shikizai1937.47.112